Problem thermco2 SNF 2008-08-29 13:46:34: needs new vacuum wand tip
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Fri Aug 29 13:46:35 PDT 2008
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Comment thermco2 SNF 2008-08-18 15:51:22: reset after power fail
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Shutdown thermco2 SNF 2008-08-29 14:51:52: 6" boats are larger than 6" wafers
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Comment thermco2 SNF 2008-08-18 15:51:22: reset after power fail
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Shutdown thermco2 SNF 2008-08-29 14:51:52: 6" boats are larger than 6" wafers
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