Shutdown thermco2 SNF 2008-08-29 14:51:52: 6" boats are larger than 6" wafers

maurice at snf.stanford.edu maurice at snf.stanford.edu
Fri Aug 29 14:51:52 PDT 2008

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The two large  boats in Thermco2 don't hold 6" wafers.  They ar too big.
The boats in Thermco1 are the correct size

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