Shutdown thermco2 SNF 2008-08-29 14:51:52: 6" boats are larger than 6" wafers
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Fri Aug 29 14:53:45 PDT 2008
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Shutdown thermco2 SNF 2008-08-29 14:51:52: 6" boats are larger than 6" wafers
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Problem thermco2 SNF 2008-08-29 14:54:19: 6" boats are too big
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this is proble4m...not a shutdown
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Shutdown thermco2 SNF 2008-08-29 14:51:52: 6" boats are larger than 6" wafers
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Problem thermco2 SNF 2008-08-29 14:54:19: 6" boats are too big
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