Problem thermco2 SNF 2008-08-29 14:54:19: 6" boats are too big
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Fri Aug 29 14:54:20 PDT 2008
The two large boats in Thermco2 don't hold 6" wafers. They ar too big.
The boats in Thermco1 are the correct size
More information about the thermco2-pcs
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