From gyama at snf.stanford.edu Thu Jan 17 16:14:51 2008 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Thu, 17 Jan 2008 16:14:51 -0800 Subject: Comment thermco2 SNF 2008-01-17 16:14:51: ran 1100C wet for 37' Message-ID: target was 5000A, came out 943A From gyama at snf.stanford.edu Fri Jan 18 08:58:12 2008 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Fri, 18 Jan 2008 08:58:12 -0800 Subject: Problem thermco2 SNF 2008-01-18 08:58:11: CAUTION: low wet ox thk twice... Message-ID: 1st - 37' @ 1100C target 5000A, got 943A 2nd - 32' @ 1000C, target 4000A, got 1995A ??? From gyama at snf.stanford.edu Fri Jan 18 09:48:23 2008 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Fri, 18 Jan 2008 09:48:23 -0800 Subject: Shutdown thermco2 SNF 2008-01-18 09:48:22: Maurice will check Message-ID: From maurice at snf.stanford.edu Fri Jan 18 16:50:27 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 18 Jan 2008 16:50:27 -0800 Subject: Comment thermco2 SNF 2008-01-17 16:14:51: ran 1100C wet for 37' Message-ID: Gary ran 2WETOX for 37 min and expected 5000A...it was about 1000. He ran a second run for 32 min and expected 4000A...he got ~4000 Seems ok now we woll keep an eye on it. From maurice at snf.stanford.edu Fri Jan 18 16:50:37 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 18 Jan 2008 16:50:37 -0800 Subject: Problem thermco2 SNF 2008-01-18 08:58:11: CAUTION: low wet ox thk twice... Message-ID: Gary ran 2WETOX for 37 min and expected 5000A...it was about 1000. He ran a second run for 32 min and expected 4000A...he got ~4000 Seems ok now we woll keep an eye on it. From maurice at snf.stanford.edu Fri Jan 18 16:50:44 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 18 Jan 2008 16:50:44 -0800 Subject: Shutdown thermco2 SNF 2008-01-18 09:48:22: Maurice will check Message-ID: Gary ran 2WETOX for 37 min and expected 5000A...it was about 1000. He ran a second run for 32 min and expected 4000A...he got ~4000 Seems ok now we woll keep an eye on it. From maurice at snf.stanford.edu Fri Jan 18 16:51:05 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 18 Jan 2008 16:51:05 -0800 Subject: Problem thermco2 SNF 2008-01-18 16:51:03: Thin oxide reported Message-ID: Gary ran 2WETOX for 37 min and expected 5000A...it was about 1000. He ran a second run for 32 min and expected 4000A...he got ~4000 Seems ok now we woll keep an eye on it. From king at snf.stanford.edu Wed Jan 23 20:43:50 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 23 Jan 2008 20:43:50 -0800 Subject: Comment thermco2 SNF 2008-01-23 20:43:49: Oxidation looks OK Message-ID: I ran 38 min 1100C wet ox in Thermco2 and the result was fine. Avg of 5048.6A on 5 of 25 wafers. +- about 10 A, with the very front dropping off by 25A. From tberg at snf.stanford.edu Thu Jan 24 06:26:56 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 24 Jan 2008 06:26:56 -0800 Subject: Problem thermco2 SNF 2008-01-18 16:51:03: Thin oxide reported Message-ID: No problems reported by subsequent users From yenilmez at snf.stanford.edu Fri Jan 25 17:32:20 2008 From: yenilmez at snf.stanford.edu (yenilmez at snf.stanford.edu) Date: Fri, 25 Jan 2008 17:32:20 -0800 Subject: Comment thermco2 SNF 2008-01-25 17:32:19: 64min at wet 1000C Message-ID: average thickness: 3859A standard deviation over all measurements:25A max standard deviation on an individual wafer:17A