Comment thermco2 SNF 2008-01-23 20:43:49: Oxidation looks OK

king at snf.stanford.edu king at snf.stanford.edu
Wed Jan 23 20:43:50 PST 2008


I ran 38 min 1100C wet ox in Thermco2 and the result was fine.  Avg of 5048.6A on 5 of 25 wafers.  +- about 10 A, with the very front dropping off by 25A. 




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