From rwoo at snf.stanford.edu Sat Mar 1 08:59:05 2008 From: rwoo at snf.stanford.edu (rwoo at snf.stanford.edu) Date: Sat, 1 Mar 2008 08:59:05 -0800 Subject: Problem thermco2 SNF 2008-03-01 08:59:04: vacuum wand tip loose again Message-ID: From tberg at snf.stanford.edu Mon Mar 3 07:45:22 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 3 Mar 2008 07:45:22 -0800 Subject: Problem thermco2 SNF 2008-03-01 08:59:04: vacuum wand tip loose again Message-ID: replaced tip From tberg at snf.stanford.edu Mon Mar 3 07:45:57 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 3 Mar 2008 07:45:57 -0800 Subject: Comment thermco2 SNF 2008-01-23 20:43:49: Oxidation looks OK Message-ID: Noted From libei at snf.stanford.edu Thu Mar 13 12:44:26 2008 From: libei at snf.stanford.edu (libei at snf.stanford.edu) Date: Thu, 13 Mar 2008 12:44:26 -0700 Subject: Problem thermco2 SNF 2008-03-13 12:44:26: tube doesn't come out after recipe successfully loading Message-ID: After I loaded recipe and hit "start", the tube doesn't come out and on computer it shows---"N2: IGN CON SCAV TLCCAR, calibr interlock". From maurice at snf.stanford.edu Thu Mar 13 13:29:39 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 13 Mar 2008 13:29:39 -0700 Subject: Shutdown thermco2 SNF 2008-03-13 13:29:39: boat not pulling Message-ID: Won't move manually or automatically From tberg at snf.stanford.edu Thu Mar 20 10:53:59 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 20 Mar 2008 10:53:59 -0700 Subject: Comment thermco2 SNF 2008-03-20 10:53:58: Changed BL board Message-ID: Still not moving. continuing to troubleshoot From tberg at snf.stanford.edu Sun Mar 23 09:32:28 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Mar 2008 09:32:28 -0700 Subject: Comment thermco2 SNF 2008-03-23 09:32:27: bad gas interface board Message-ID: Gas interface board is bad pulling down -15 v supply effecting Boat loader. board is on order From tberg at snf.stanford.edu Tue Mar 25 07:26:00 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 25 Mar 2008 07:26:00 -0700 Subject: Problem thermco2 SNF 2008-03-13 12:44:26: tube doesn't come out after recipe successfully loading Message-ID: Replaced Gas interface board and Lo O2 MFC Did temp cal,boat cal and checked flows. needs test From tberg at snf.stanford.edu Tue Mar 25 07:26:10 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 25 Mar 2008 07:26:10 -0700 Subject: Comment thermco2 SNF 2008-03-20 10:53:58: Changed BL board Message-ID: Replaced Gas interface board and Lo O2 MFC Did temp cal,boat cal and checked flows. needs test From tberg at snf.stanford.edu Tue Mar 25 07:26:18 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 25 Mar 2008 07:26:18 -0700 Subject: Comment thermco2 SNF 2008-03-23 09:32:27: bad gas interface board Message-ID: Replaced Gas interface board and Lo O2 MFC Did temp cal,boat cal and checked flows. needs test From tberg at snf.stanford.edu Tue Mar 25 07:26:44 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 25 Mar 2008 07:26:44 -0700 Subject: Comment thermco2 SNF 2008-03-25 07:26:44: Needs Test Message-ID: Replaced Gas interface board and Lo O2 MFC Did temp cal,boat cal and checked flows. needs test From maurice at snf.stanford.edu Tue Mar 25 13:45:47 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 25 Mar 2008 13:45:47 -0700 Subject: Comment thermco2 SNF 2008-03-25 13:45:46: Runinng a test... Message-ID: Test after Gas interface board replaced From maurice at snf.stanford.edu Tue Mar 25 16:56:01 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 25 Mar 2008 16:56:01 -0700 Subject: Comment thermco2 SNF 2008-03-25 16:56:01: 1st test thin Message-ID: 2wetox 00:08:15 at 1000c expected 1000Ang Actual 367Ang (if it was dry only it should have been 144 ang) I will repeat the run and watch the gas flows From maurice at snf.stanford.edu Wed Mar 26 10:27:44 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 26 Mar 2008 10:27:44 -0700 Subject: Comment thermco2 SNF 2008-03-26 10:27:43: 2nd test thin Message-ID: 2wetox 00:8:15 (plus 20 minutes of dry...10 on each side of the wet ox) expected 1000ang actual ~350 Thickness calculator gives 302 Ang for dry ox with 28 min. Looks like we have no wet ox. From tberg at snf.stanford.edu Thu Mar 27 13:26:20 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 27 Mar 2008 13:26:20 -0700 Subject: Comment thermco2 SNF 2008-03-27 13:26:20: No H2 flow Message-ID: Adjusted H2 ratio on New Gas interface board ran 2wetox for 15 min no problem From maurice at snf.stanford.edu Thu Mar 27 13:35:47 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 27 Mar 2008 13:35:47 -0700 Subject: Comment thermco2 SNF 2008-03-27 13:35:47: running test Message-ID: Test after H2 ratio on New Gas interface board adjusted. From maurice at snf.stanford.edu Thu Mar 27 16:41:07 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 27 Mar 2008 16:41:07 -0700 Subject: Comment thermco2 SNF 2008-03-27 13:35:47: running test Message-ID: Test good 2wetox 00:08:15 expected 1000A actual 992 ~1.0% across the tube ~1.0% wafer to wafer From maurice at snf.stanford.edu Thu Mar 27 16:41:48 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 27 Mar 2008 16:41:48 -0700 Subject: Comment thermco2 SNF 2008-03-27 13:26:20: No H2 flow Message-ID: From maurice at snf.stanford.edu Thu Mar 27 16:44:05 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 27 Mar 2008 16:44:05 -0700 Subject: Comment thermco2 SNF 2008-03-26 10:27:43: 2nd test thin Message-ID: logged From maurice at snf.stanford.edu Thu Mar 27 16:44:20 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 27 Mar 2008 16:44:20 -0700 Subject: Comment thermco2 SNF 2008-03-25 16:56:01: 1st test thin Message-ID: logged From maurice at snf.stanford.edu Thu Mar 27 16:46:14 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 27 Mar 2008 16:46:14 -0700 Subject: Comment thermco2 SNF 2008-03-25 13:45:46: Runinng a test... Message-ID: test was thin From maurice at snf.stanford.edu Thu Mar 27 16:46:27 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 27 Mar 2008 16:46:27 -0700 Subject: Comment thermco2 SNF 2008-03-25 07:26:44: Needs Test Message-ID: logged From maurice at snf.stanford.edu Thu Mar 27 16:47:03 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 27 Mar 2008 16:47:03 -0700 Subject: Shutdown thermco2 SNF 2008-03-13 13:29:39: boat not pulling Message-ID: Replaced Gas interface board and Lo O2 MFC Did temp cal,boat cal and checked flows. needs test From maurice at snf.stanford.edu Thu Mar 27 16:47:38 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 27 Mar 2008 16:47:38 -0700 Subject: Comment thermco2 SNF 2008-01-25 17:32:19: 64min at wet 1000C Message-ID: logged