Problem thermco2 SNF 2009-04-23 19:28:05: Poor intra wafer uniformity for dryox

maurice at snf.stanford.edu maurice at snf.stanford.edu
Fri May 1 16:49:41 PDT 2009


Repeated Skoh's run of 2dryox  950c for 1 hour.  On wafer uniformity was ok.  Results below:
#1
Average:	343.28	
Minimum:	341.49
Maximum:	345.51
Std Dev:	1.1598
% Range:	0.58655	
1:(0.00,4.00)	343.60
2:(0.00,2.00)	342.53
3:(0.00,0.00)	343.11
4:(0.00,-2.00)	343.48		
5:(0.00,-4.00)	345.51		
6:(-4.00,0.00)	343.97		
7:(-2.00,0.00)	343.64		
8:(2.00,0.00)	342.18		
9:(4.00,0.00)	341.49
#2
Average:	351.69	
Minimum:	347.88	
Std Dev:	3.5482	
1:(0.00,4.00)	347.88	
2:(0.00,2.00)	352.07	
3:(0.00,0.00)	352.70	
4:(0.00,-2.00)	350.77	
5:(0.00,-4.00)	349.68	
6:(-4.00,0.00)	348.39	
7:(-2.00,0.00)	350.06	
8:(2.00,0.00)	359.43	
9:(4.00,0.00)	354.26	
#25	
Average:	352.25
Minimum:	347.22	
Maximum:	356.82
Std Dev:	3.4422	
% Range:	1.3624	
1:(0.00,4.00)	347.63	
2:(0.00,2.00)	350.36	
3:(0.00,0.00)	353.94	
4:(0.00,-2.00)	356.32	
5:(0.00,-4.00)	356.82	
6:(-4.00,0.00)	353.06
7:(-2.00,0.00)	353.78
8:(2.00,0.00)	351.13	
9:(4.00,0.00)	347.22
#26	
Average:	347.28
Minimum:	344.66
Maximum:	348.84	
Std Dev:	1.2701
% Range:	0.60182
1:(0.00,4.00)	346.08	
2:(0.00,2.00)	347.39	
3:(0.00,0.00)	348.84	
4:(0.00,-2.00)	348.11	
5:(0.00,-4.00)	347.75	
6:(-4.00,0.00)	347.96	
7:(-2.00,0.00)	347.97	
8:(2.00,0.00)	346.73	
9:(4.00,0.00)	344.66	
#49	
Average:	347.05
Minimum:	343.83	
Maximum:	350.60	
Std Dev:	2.0753	
% Range:	0.97479	
1:(0.00,4.00)	345.86	
2:(0.00,2.00)	345.99	
3:(0.00,0.00)	347.99	
4:(0.00,-2.00)	347.56	
5:(0.00,-4.00)	347.60	
6:(-4.00,0.00)	350.60	
7:(-2.00,0.00)	348.94	
8:(2.00,0.00)	345.06	
9:(4.00,0.00)	343.83
	
#50	
Average:	344.74	
Minimum:	340.86	
Maximum:	350.52	
Std Dev:	2.9862	
% Range:	1.4003
1:(0.00,4.00)	343.87
2:(0.00,2.00)	343.65	
3:(0.00,0.00)	343.50	
4:(0.00,-2.00)	345.06	
5:(0.00,-4.00)	346.60	
6:(-4.00,0.00)	350.52	
7:(-2.00,0.00)	347.10	
8:(2.00,0.00)	341.53
9:(4.00,0.00)	340.86




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