From grahamab at snf.stanford.edu Fri Aug 6 12:51:49 2010 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Fri, 6 Aug 2010 12:51:49 -0700 Subject: Shutdown thermco2 SNF 2010-08-06 12:51:48: torch possibly not lighting Message-ID: Deposition was much less than expected and roughly matches with dryox only when wetox was called for. Maurice suggested this is the likely problem and to shutdown the tool. From tberg at snf.stanford.edu Fri Aug 6 13:20:43 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 6 Aug 2010 13:20:43 -0700 Subject: Shutdown thermco2 SNF 2010-08-06 12:51:48: torch possibly not lighting Message-ID: H2 to the bank wasoff ater gas alarm yesterday . Reset H2 is normal now From tberg at snf.stanford.edu Mon Aug 16 12:15:29 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 16 Aug 2010 12:15:29 -0700 Subject: Comment thermco2 SNF 2010-08-16 12:15:29: did boaT AND TEMP CALS Message-ID: