From wslee at snf.stanford.edu  Mon Aug  1 12:41:45 2011
From: wslee at snf.stanford.edu (wslee at snf.stanford.edu)
Date: Mon, 1 Aug 2011 12:41:45 -0700
Subject: Problem thermco2 SNF 2011-08-01 12:41:44: Broken wafer pieces
Message-ID: <mailman.201.1356283531.4803.thermco2-pcs@snf.stanford.edu>

There are some broken wafer pieces in the boat.



From jprovine at snf.stanford.edu  Sun Aug  7 16:05:24 2011
From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu)
Date: Sun, 7 Aug 2011 16:05:24 -0700
Subject: Problem thermco2 SNF 2011-08-07 16:05:24: temperature stabilization issue
Message-ID: <mailman.202.1356283531.4803.thermco2-pcs@snf.stanford.edu>

running 2wetox, the tube could not reach 1100 for center or door regions after 3+ hours of ramp us (stuck around 1085).  restarted recipe with longer time for temp 1050C.



From tberg at snf.stanford.edu  Fri Aug 12 09:26:13 2011
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Fri, 12 Aug 2011 09:26:13 -0700
Subject: Problem thermco2 SNF 2011-01-20 15:28:18: No TLC flow
Message-ID: <mailman.203.1356283531.4803.thermco2-pcs@snf.stanford.edu>

Adjusted Hardware interlock for O2 flow ratio. Ran 2TLCCLEA TLC
 flowed fine.