Problem thermco2 SNF 2011-08-07 16:05:24: temperature stabilization issue

jprovine at snf.stanford.edu jprovine at snf.stanford.edu
Sun Aug 7 16:05:24 PDT 2011


running 2wetox, the tube could not reach 1100 for center or door regions after 3+ hours of ramp us (stuck around 1085).  restarted recipe with longer time for temp 1050C.




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