From tberg at snf.stanford.edu  Thu Jun  9 13:52:26 2011
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Thu, 9 Jun 2011 13:52:26 -0700
Subject: Shutdown thermco2 SNF 2011-06-09 13:52:25: DOME coated
Message-ID: <mailman.185.1356283531.4803.thermco2-pcs@snf.stanford.edu>

DOME coated. Running MOetch



From tberg at snf.stanford.edu  Thu Jun  9 13:53:26 2011
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Thu, 9 Jun 2011 13:53:26 -0700
Subject: Shutdown thermco2 SNF 2011-06-09 13:52:25: DOME coated
Message-ID: <mailman.186.1356283531.4803.thermco2-pcs@snf.stanford.edu>

Wrong tool



From mislam at snf.stanford.edu  Fri Jun 17 23:09:05 2011
From: mislam at snf.stanford.edu (mislam at snf.stanford.edu)
Date: Fri, 17 Jun 2011 23:09:05 -0700
Subject: Problem thermco2 SNF 2011-06-17 23:09:05: Temp stabilization problem
Message-ID: <mailman.187.1356283531.4803.thermco2-pcs@snf.stanford.edu>

Started a 110C wet oxidation. After rampup temp won't stabilize at 1100C and oxidation never started even after 2 hours. Temp reading oscillates  around setpoint, does not settle down.



From mislam at snf.stanford.edu  Sat Jun 18 09:32:35 2011
From: mislam at snf.stanford.edu (mislam at snf.stanford.edu)
Date: Sat, 18 Jun 2011 09:32:35 -0700
Subject: Comment thermco2 SNF 2011-06-18 09:32:35: Correction
Message-ID: <mailman.188.1356283531.4803.thermco2-pcs@snf.stanford.edu>

I meant 1100C wet oxidation on my problem report above, not 110C. Sorry about the typo.



From elvislin at snf.stanford.edu  Mon Jun 20 14:59:34 2011
From: elvislin at snf.stanford.edu (elvislin at snf.stanford.edu)
Date: Mon, 20 Jun 2011 14:59:34 -0700
Subject: Problem thermco2 SNF 2011-06-20 14:59:33: rate is off!!
Message-ID: <mailman.189.1356283531.4803.thermco2-pcs@snf.stanford.edu>

I target 2290A by setting 2wetox with 27m51s. however the thickness was measured only ~550A. uniformity is ok ~3% on wafer and 9% between the 9wafers. please look into it thanks!!