Problem thermco2 SNF 2011-06-20 14:59:33: rate is off!!

elvislin at snf.stanford.edu elvislin at snf.stanford.edu
Mon Jun 20 14:59:34 PDT 2011


I target 2290A by setting 2wetox with 27m51s. however the thickness was measured only ~550A. uniformity is ok ~3% on wafer and 9% between the 9wafers. please look into it thanks!!




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