From minchieh at snf.stanford.edu Thu Aug 2 15:51:52 2012 From: minchieh at snf.stanford.edu (minchieh at snf.stanford.edu) Date: Thu, 2 Aug 2012 15:51:52 -0700 Subject: Comment thermco2 SNF 2012-08-02 15:51:51: bad crack happened to one of the wafers Message-ID: I did a 1000'C, 1.5 hr wetox for 0.5 um oxide on 3 brand new b-test wafers, and one of the wafers came out with some cracks, and two places on the side were even curved / bent (looks like some clamp marks). The other two wafers are completely normal though. I believe I didn't put the wafer in cross-slots. Not sure whether that particular slot has any problem. I used the 2nd cassette from left in Thermco2 and just want to let people know about this. From npapte at snf.stanford.edu Thu Aug 2 16:44:38 2012 From: npapte at snf.stanford.edu (npapte at snf.stanford.edu) Date: Thu, 2 Aug 2012 16:44:38 -0700 Subject: Problem thermco2 SNF 2012-08-02 16:44:37: no TLC flow Message-ID: