From maurice at snf.stanford.edu Tue Dec 6 15:48:18 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 6 Dec 2011 15:48:18 -0800 Subject: Shutdown thermco3 SNF 2010-11-03 08:12:17: tool not in service yet Message-ID: testing From maurice at snf.stanford.edu Tue Dec 6 15:50:01 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 6 Dec 2011 15:50:01 -0800 Subject: Problem thermco3 SNF 2011-12-06 15:50:01: testing Message-ID: B chui will use thermco3 for thick oxide From bchui at snf.stanford.edu Wed Dec 7 21:35:45 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Wed, 7 Dec 2011 21:35:45 -0800 Subject: Comment thermco3 SNF 2011-12-07 21:35:44: oxidation results look good Message-ID: 3WETOX 1050C for 1 hour first boat from left (user end): 5100A second boat: 5074A Uniform across wafer and across boat (oxidized 25 wafers total) theory: 5150A From bchui at snf.stanford.edu Sun Dec 11 22:28:39 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sun, 11 Dec 2011 22:28:39 -0800 Subject: Problem thermco3 SNF 2011-12-11 22:28:38: 3ANNEAL does not compile Message-ID: missing a subroutine..error is something like "RAMPUPN1 doesn't exist" From tberg at snf.stanford.edu Tue Dec 13 07:41:41 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 13 Dec 2011 07:41:41 -0800 Subject: Shutdown thermco3 SNF 2011-12-13 07:41:41: renovation Message-ID: