Comment thermco3 SNF 2011-12-07 21:35:44: oxidation results look good

bchui at bchui at
Wed Dec 7 21:35:45 PST 2011

3WETOX 1050C for 1 hour
first boat from left (user end): 5100A
second boat: 5074A
Uniform across wafer and across boat (oxidized 25 wafers total)
theory: 5150A

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