Comment thermco3 SNF 2011-12-07 21:35:44: oxidation results look good

bchui at snf.stanford.edu bchui at snf.stanford.edu
Wed Dec 7 21:35:45 PST 2011


3WETOX 1050C for 1 hour
first boat from left (user end): 5100A
second boat: 5074A
Uniform across wafer and across boat (oxidized 25 wafers total)
theory: 5150A




More information about the thermco3-pcs mailing list