From maurice at snf.stanford.edu  Wed Feb  8 14:23:18 2012
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Wed, 8 Feb 2012 14:23:18 -0800
Subject: Comment thermco3 SNF 2012-02-08 14:23:18: testing
Message-ID: <mailman.12.1356283538.4818.thermco3-pcs@snf.stanford.edu>




From maurice at snf.stanford.edu  Tue Feb 14 11:37:20 2012
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Tue, 14 Feb 2012 11:37:20 -0800
Subject: Comment thermco3 SNF 2012-02-14 11:37:20: Feb Qual
Message-ID: <mailman.13.1356283538.4818.thermco3-pcs@snf.stanford.edu>

1wetox   
900c  
00:39:00   
Target 1000ang   
limits 900-1100ang
-
wafer1
t	1:(0.00,4.00)	1054.6
tc	2:(0.00,2.00)	1049.1
c	3:(0.00,0.00)	1053
bc	4:(0.00,-2.00)	1047.1
bc	5:(0.00,-4.00)	1055.6
l	6:(-4.00,0.00)	1051.2
lc	7:(-2.00,0.00)	1051.2
rc	8:(2.00,0.00)	1050.4
rc	9:(4.00,0.00)	1046.3
-
Wafer 25
1:(0.00,4.00)	1057.6
2:(0.00,2.00)	1047.6
3:(0.00,0.00)	1049.4
4:(0.00,-2.00)	1045.3
5:(0.00,-4.00)	1044.4
6:(-4.00,0.00)	1046.8
7:(-2.00,0.00)	1047.5
8:(2.00,0.00)	1046.3
9:(4.00,0.00)	1042.7
-
wafer 50
1:(0.00,4.00)	1041.8
2:(0.00,2.00)	1037.7
3:(0.00,0.00)	1042.2
4:(0.00,-2.00)	1036.7
5:(0.00,-4.00)	1040.4
6:(-4.00,0.00)	1039.9
7:(-2.00,0.00)	1041.2
8:(2.00,0.00)	1039.7
9:(4.00,0.00)	1038.4	



From maurice at snf.stanford.edu  Tue Feb 14 11:40:50 2012
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Tue, 14 Feb 2012 11:40:50 -0800
Subject: Shutdown thermco3 SNF 2011-12-13 07:41:41: renovation
Message-ID: <mailman.14.1356283538.4818.thermco3-pcs@snf.stanford.edu>

complete



From tberg at snf.stanford.edu  Thu Feb 23 06:46:16 2012
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Thu, 23 Feb 2012 06:46:16 -0800
Subject: Problem thermco3 SNF 2011-12-11 22:28:38: 3ANNEAL does not compile
Message-ID: <mailman.15.1356283538.4818.thermco3-pcs@snf.stanford.edu>

CORRECTED RECIPE



From maurice at snf.stanford.edu  Tue Feb 28 08:50:57 2012
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Tue, 28 Feb 2012 08:50:57 -0800
Subject: Problem thermco3 SNF 2011-12-06 15:50:01: testing
Message-ID: <mailman.16.1356283538.4818.thermco3-pcs@snf.stanford.edu>

B chui used it



From maurice at snf.stanford.edu  Tue Feb 28 08:51:08 2012
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Tue, 28 Feb 2012 08:51:08 -0800
Subject: Comment thermco3 SNF 2012-02-08 14:23:18: testing
Message-ID: <mailman.17.1356283538.4818.thermco3-pcs@snf.stanford.edu>

clear



From maurice at snf.stanford.edu  Tue Feb 28 08:51:18 2012
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Tue, 28 Feb 2012 08:51:18 -0800
Subject: Comment thermco3 SNF 2011-12-07 21:35:44: oxidation results look good
Message-ID: <mailman.18.1356283538.4818.thermco3-pcs@snf.stanford.edu>

log