Comment thermco3 SNF 2012-02-14 11:37:20: Feb Qual

maurice at snf.stanford.edu maurice at snf.stanford.edu
Tue Feb 14 11:37:20 PST 2012


1wetox   
900c  
00:39:00   
Target 1000ang   
limits 900-1100ang
-
wafer1
t	1:(0.00,4.00)	1054.6
tc	2:(0.00,2.00)	1049.1
c	3:(0.00,0.00)	1053
bc	4:(0.00,-2.00)	1047.1
bc	5:(0.00,-4.00)	1055.6
l	6:(-4.00,0.00)	1051.2
lc	7:(-2.00,0.00)	1051.2
rc	8:(2.00,0.00)	1050.4
rc	9:(4.00,0.00)	1046.3
-
Wafer 25
1:(0.00,4.00)	1057.6
2:(0.00,2.00)	1047.6
3:(0.00,0.00)	1049.4
4:(0.00,-2.00)	1045.3
5:(0.00,-4.00)	1044.4
6:(-4.00,0.00)	1046.8
7:(-2.00,0.00)	1047.5
8:(2.00,0.00)	1046.3
9:(4.00,0.00)	1042.7
-
wafer 50
1:(0.00,4.00)	1041.8
2:(0.00,2.00)	1037.7
3:(0.00,0.00)	1042.2
4:(0.00,-2.00)	1036.7
5:(0.00,-4.00)	1040.4
6:(-4.00,0.00)	1039.9
7:(-2.00,0.00)	1041.2
8:(2.00,0.00)	1039.7
9:(4.00,0.00)	1038.4	




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