From maurice at snf.stanford.edu  Wed Jun 20 13:32:57 2012
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Wed, 20 Jun 2012 13:32:57 -0700
Subject: Comment thermco3 SNF 2012-06-20 13:32:56: June Qual
Message-ID: <mailman.23.1356283538.4818.thermco3-pcs@snf.stanford.edu>

Wet 900  39 min
expected~1000A
Boat1 wafer1
1019.7
1021.4
1025.5
1020.1
1022.1
1022.9
1025.1
1021.9
1018.7
-
Boat 1 wafer25
1028.2
1022.7
1024.5
1019.7
1020
1019.4
1024.7
1020.8
1017.7
-
boat2 wafer 25
1013.8
1018.2
1028.7
1046.5
1051.7
1016.1
1020.9
1030
1020.4



From eldwin at snf.stanford.edu  Thu Jun 21 08:13:18 2012
From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu)
Date: Thu, 21 Jun 2012 08:13:18 -0700
Subject: Comment thermco3 SNF 2012-06-21 08:13:18: 1um wetox good
Message-ID: <mailman.24.1356283538.4818.thermco3-pcs@snf.stanford.edu>

Ran 3WETOX at 1100C for 02:15:00
Expected: 1um, Actual: 0.978um