Wet 900 39 min expected~1000A Boat1 wafer1 1019.7 1021.4 1025.5 1020.1 1022.1 1022.9 1025.1 1021.9 1018.7 - Boat 1 wafer25 1028.2 1022.7 1024.5 1019.7 1020 1019.4 1024.7 1020.8 1017.7 - boat2 wafer 25 1013.8 1018.2 1028.7 1046.5 1051.7 1016.1 1020.9 1030 1020.4