Comment thermco4 SNF 2012-09-28 14:46:52: Thermco4 Sept Qual complete

maurice at snf.stanford.edu maurice at snf.stanford.edu
Sun Dec 23 09:25:41 PST 2012

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Thermco4 Sept Qual complete
4WETOX  900c  00:39:00  50 wafer spread
wafer1 (front of first boat)
1100,1094, 1090, 1083, 1079, 1087, 1088, 1091, 1104
wafer2 (end of first boat)
1110, 1111, 1108, 1104, 1098, 1102, 1107, 1108, 1105
wafer3 (end of second boat)
1117, 1115, 1113, 1109, 1106, 1116, 1113, 1110, 1107

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