From maurice at snf.stanford.edu Wed Feb 8 14:26:27 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 8 Feb 2012 14:26:27 -0800 Subject: Comment thermco4 SNF 2012-02-08 14:26:27: testing Message-ID: From maurice at snf.stanford.edu Tue Feb 14 11:40:16 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 14 Feb 2012 11:40:16 -0800 Subject: Comment thermco4 SNF 2012-02-14 11:40:15: Feb Qual (above upper limit) Message-ID: 1wetox 900c 00:39:00 Target 1000ang limits 900-1100ang Wafer1 t 1:(0.00,4.00) 1137.9 tc 2:(0.00,2.00) 1134.3 c 3:(0.00,0.00) 1131.4 bc 4:(0.00,-2.00) 1124.9 bc 5:(0.00,-4.00) 1121 l 6:(-4.00,0.00) 1129.8 lc 7:(-2.00,0.00) 1128.9 rc 8:(2.00,0.00) 1131.2 rc 9:(4.00,0.00) 1131.1 - wafer 25 1:(0.00,4.00) 1140 2:(0.00,2.00) 1139.8 3:(0.00,0.00) 1141 4:(0.00,-2.00) 1136.4 5:(0.00,-4.00) 1133.3 6:(-4.00,0.00) 1136.7 7:(-2.00,0.00) 1137.7 8:(2.00,0.00) 1138.7 9:(4.00,0.00) 1138.5 - wafer 50 1:(0.00,4.00) 1153.1 2:(0.00,2.00) 1156.8 3:(0.00,0.00) 1185.5 4:(0.00,-2.00) 1156.1 5:(0.00,-4.00) 1134.4 6:(-4.00,0.00) 1177.3 7:(-2.00,0.00) 1247 8:(2.00,0.00) 1144.1 9:(4.00,0.00) 1139.5 From maurice at snf.stanford.edu Fri Feb 17 11:50:15 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 17 Feb 2012 11:50:15 -0800 Subject: Shutdown thermco4 SNF 2010-11-03 08:12:26: tool not in service yet Message-ID: Good oxide tube