Comment thermco4 SNF 2012-02-14 11:40:15: Feb Qual (above upper limit)

maurice at snf.stanford.edu maurice at snf.stanford.edu
Tue Feb 14 11:40:16 PST 2012


1wetox   
900c  
00:39:00   
Target 1000ang   
limits 900-1100ang
Wafer1
t	1:(0.00,4.00)	1137.9
tc	2:(0.00,2.00)	1134.3
c	3:(0.00,0.00)	1131.4
bc	4:(0.00,-2.00)	1124.9
bc	5:(0.00,-4.00)	1121
l	6:(-4.00,0.00)	1129.8
lc	7:(-2.00,0.00)	1128.9
rc	8:(2.00,0.00)	1131.2
rc	9:(4.00,0.00)	1131.1
- 
wafer 25
1:(0.00,4.00)	1140
2:(0.00,2.00)	1139.8
3:(0.00,0.00)	1141
4:(0.00,-2.00)	1136.4
5:(0.00,-4.00)	1133.3
6:(-4.00,0.00)	1136.7
7:(-2.00,0.00)	1137.7
8:(2.00,0.00)	1138.7
9:(4.00,0.00)	1138.5
-
wafer 50
1:(0.00,4.00)	1153.1
2:(0.00,2.00)	1156.8
3:(0.00,0.00)	1185.5
4:(0.00,-2.00)	1156.1
5:(0.00,-4.00)	1134.4
6:(-4.00,0.00)	1177.3
7:(-2.00,0.00)	1247
8:(2.00,0.00)	1144.1
9:(4.00,0.00)	1139.5




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