From jaehlee at snf.stanford.edu Thu Sep 23 20:59:54 2010 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Thu, 23 Sep 2010 20:59:54 -0700 Subject: Problem thermcolto SNF 2010-09-23 20:59:53: no LTO has been deposited Message-ID: Probably SiH4 gas is not flowing right as narii described in thermcopoly1.