Problem thermconitride1 2004-03-19 00:48:53: Tube pulled (unexpectedly?)

Eric Perozziello eap at gloworm.Stanford.EDU
Fri Mar 19 12:35:13 PST 2004

Thanks Ted.

I'm not sure what happened, but somebody came and got me when
books were falling off the loader!  We cleared the wafers off
before they got it.


On Fri, 19 Mar 2004, ted berg wrote:

> Eric, thanks again for helping out.  the tube was in a standby recipe
> similar to the tylans.  If sombody hit start it would vent and
>  pull out. i will put it back in that mode but will disable boat loader
> so it will not pull even if it gets venteed
> ericp at wrote:
> >Someone noticed the tube coming out at 12:30.
> >The problem was that the shelf onto which the
> >tube pulls was full of wafers, papers, etc.
> >We cleared the shelf of what was remaining (in case
> >it decides to pull again), and sent the tube back in
> >manually.
> >-Eric
> >
> >
> >

More information about the thermconitride1-pcs mailing list