From maurice at snf.stanford.edu Mon May 1 11:01:11 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 1 May 2006 11:01:11 -0700 Subject: Comment thermconitride1 SNF 2006-05-01 11:00:19: dcs flow low Message-ID: NITTEMP recipe asks for 150 sccm of DCS only 25 sccm flowing