Problem thermconitride1 SNF 2006-11-08 18:47:07: FAiled leak check twice

nvgirish at snf.stanford.edu nvgirish at snf.stanford.edu
Wed Nov 8 18:47:08 PST 2006


Hi
  I was running recipe T800 (800C nitride deposition for 30min) and the leak check failed twice. Never happened before.
Girish




More information about the thermconitride1-pcs mailing list