From maurice at snf.stanford.edu  Fri Mar 16 16:44:38 2007
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Fri, 16 Mar 2007 16:44:38 -0700
Subject: Problem thermconitride1 SNF 2007-03-16 16:44:38: DCS flow not hitting setpoint
Message-ID: <mailman.33.1356283550.4862.thermconitride1-pcs@snf.stanford.edu>

User reports that DCS setpoint was 47 but flow was only 26



From tberg at snf.stanford.edu  Mon Mar 19 14:32:01 2007
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Mon, 19 Mar 2007 14:32:01 -0700
Subject: Problem thermconitride1 SNF 2007-03-16 16:44:38: DCS flow not hitting setpoint
Message-ID: <mailman.34.1356283550.4862.thermconitride1-pcs@snf.stanford.edu>

Checkec flows from25 to 100sccm no problem



From sanjah at snf.stanford.edu  Tue Mar 20 16:35:36 2007
From: sanjah at snf.stanford.edu (sanjah at snf.stanford.edu)
Date: Tue, 20 Mar 2007 16:35:36 -0700
Subject: Problem thermconitride1 SNF 2007-03-20 16:35:35: DCS fow only 25 in deposition step
Message-ID: <mailman.35.1356283550.4862.thermconitride1-pcs@snf.stanford.edu>

setpoint is 45 (N2 recipe)



From tberg at snf.stanford.edu  Wed Mar 21 10:02:55 2007
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Wed, 21 Mar 2007 10:02:55 -0700
Subject: Shutdown thermconitride1 SNF 2007-03-21 10:02:55: Tube computer lost Program
Message-ID: <mailman.36.1356283550.4862.thermconitride1-pcs@snf.stanford.edu>




From tberg at snf.stanford.edu  Thu Mar 22 08:37:38 2007
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Thu, 22 Mar 2007 08:37:38 -0700
Subject: Shutdown thermconitride1 SNF 2007-03-21 10:02:55: Tube computer lost Program
Message-ID: <mailman.37.1356283550.4862.thermconitride1-pcs@snf.stanford.edu>

Reloded program, ran 8mV cal and boat cal. Ran Recipe N2 for 20 minutes flows OK



From tberg at snf.stanford.edu  Thu Mar 22 08:38:18 2007
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Thu, 22 Mar 2007 08:38:18 -0700
Subject: Problem thermconitride1 SNF 2007-03-20 16:35:35: DCS fow only 25 in deposition step
Message-ID: <mailman.38.1356283550.4862.thermconitride1-pcs@snf.stanford.edu>

Reloaded program ran Recipe N2 for 20 min flows OK