From maurice at snf.stanford.edu  Tue Dec  2 11:16:29 2008
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Tue, 2 Dec 2008 11:16:29 -0800
Subject: Problem thermconitride1 SNF 2008-12-02 11:16:28: DCS not to setpoint
Message-ID: <mailman.79.1356283551.4862.thermconitride1-pcs@snf.stanford.edu>

After 30min into a two hour LSN low stress nitride dep I noticed DCS flow at 27 (setpoint 300).  The flow was initially 300 and dropped some time in the first 30min



From tberg at snf.stanford.edu  Wed Dec  3 09:04:13 2008
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Wed, 3 Dec 2008 09:04:13 -0800
Subject: Shutdown thermconitride1 SNF 2008-12-03 09:04:13: No DCS flow
Message-ID: <mailman.80.1356283551.4862.thermconitride1-pcs@snf.stanford.edu>

Ordering new MFC



From tberg at snf.stanford.edu  Mon Dec  8 08:14:01 2008
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Mon, 8 Dec 2008 08:14:01 -0800
Subject: Shutdown thermconitride1 SNF 2008-12-03 09:04:13: No DCS flow
Message-ID: <mailman.81.1356283551.4862.thermconitride1-pcs@snf.stanford.edu>

Replaced DCS mfc. Flowed DCS for 20 Minutes. will leave it yellow to observe



From maurice at snf.stanford.edu  Fri Dec 12 16:14:20 2008
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Fri, 12 Dec 2008 16:14:20 -0800
Subject: Problem thermconitride1 SNF 2008-12-02 11:16:28: DCS not to setpoint
Message-ID: <mailman.82.1356283551.4862.thermconitride1-pcs@snf.stanford.edu>

ran the "LSN" program for 3 hours.
DCS was stabile at the 300 sccm setpoint



From mdickey at snf.stanford.edu  Mon Dec 29 08:37:07 2008
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Mon, 29 Dec 2008 08:37:07 -0800
Subject: Shutdown thermconitride1 SNF 2008-12-29 08:37:07: Burnbox
Message-ID: <mailman.83.1356283551.4862.thermconitride1-pcs@snf.stanford.edu>

Down for burnbox drain repair



From mdickey at snf.stanford.edu  Tue Dec 30 08:21:03 2008
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Tue, 30 Dec 2008 08:21:03 -0800
Subject: Shutdown thermconitride1 SNF 2008-12-29 08:37:07: Burnbox
Message-ID: <mailman.84.1356283551.4862.thermconitride1-pcs@snf.stanford.edu>

Burnbox repaired



From mdickey at snf.stanford.edu  Tue Dec 30 08:53:37 2008
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Tue, 30 Dec 2008 08:53:37 -0800
Subject: Shutdown thermconitride1 SNF 2008-12-30 08:53:36: Burnbox
Message-ID: <mailman.85.1356283551.4862.thermconitride1-pcs@snf.stanford.edu>

Problem with no O2 flow to burnbox