From maurice at snf.stanford.edu Thu Jan 3 14:53:32 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 3 Jan 2008 14:53:32 -0800 Subject: Comment thermconitride1 SNF 2008-01-03 14:53:32: testing Message-ID: From maurice at snf.stanford.edu Fri Jan 4 15:21:44 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 4 Jan 2008 15:21:44 -0800 Subject: Comment thermconitride1 SNF 2008-01-04 15:21:42: first test had no dep Message-ID: second test is in tube...will unload it monday morning From maurice at snf.stanford.edu Mon Jan 7 14:44:52 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 7 Jan 2008 14:44:52 -0800 Subject: Shutdown thermconitride1 SNF 2008-01-07 14:44:51: DCS flow not stable Message-ID: "N2" program DCS setpoint 45 flow flucuating from 15 to 45 From maurice at snf.stanford.edu Tue Jan 8 10:51:03 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 8 Jan 2008 10:51:03 -0800 Subject: Comment thermconitride1 SNF 2008-01-08 10:51:02: DCS flow too low Message-ID: "N2" program DCS setpoint 45 actual 13 From maurice at snf.stanford.edu Tue Jan 8 17:24:08 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 8 Jan 2008 17:24:08 -0800 Subject: Comment thermconitride1 SNF 2008-01-08 10:51:02: DCS flow too low Message-ID: came up to setpoint after 5 min of dep From maurice at snf.stanford.edu Tue Jan 8 17:24:40 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 8 Jan 2008 17:24:40 -0800 Subject: Shutdown thermconitride1 SNF 2008-01-07 14:44:51: DCS flow not stable Message-ID: DCS line purged From maurice at snf.stanford.edu Tue Jan 8 17:25:03 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 8 Jan 2008 17:25:03 -0800 Subject: Comment thermconitride1 SNF 2008-01-04 15:21:42: first test had no dep Message-ID: DCS was not at setpoint From maurice at snf.stanford.edu Tue Jan 8 17:25:34 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 8 Jan 2008 17:25:34 -0800 Subject: Comment thermconitride1 SNF 2008-01-03 14:53:32: testing Message-ID: Test complete. Dep good. From maurice at snf.stanford.edu Tue Jan 8 17:26:04 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 8 Jan 2008 17:26:04 -0800 Subject: Shutdown thermconitride1 SNF 2007-12-17 10:45:40: Tube pull Message-ID: Pulled, cleaned, coated, test. Ready to run. From kimsora at snf.stanford.edu Wed Jan 16 01:07:08 2008 From: kimsora at snf.stanford.edu (kimsora at snf.stanford.edu) Date: Wed, 16 Jan 2008 01:07:08 -0800 Subject: Problem thermconitride1 SNF 2008-01-16 01:07:08: Nonuniform deposition Message-ID: I deposited nitride with N2 for 36 min. The deposition was very nonuniform. From maurice at snf.stanford.edu Tue Jan 22 12:04:28 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 22 Jan 2008 12:04:28 -0800 Subject: Problem thermconitride1 SNF 2008-01-16 01:07:08: Nonuniform deposition Message-ID: other users report no problems From tberg at snf.stanford.edu Fri Jan 25 08:54:45 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 25 Jan 2008 08:54:45 -0800 Subject: Comment thermconitride1 SNF 2008-01-25 08:54:44: Replaced Tube Manometer Message-ID: