Comment thermconitride1 SNF 2008-06-10 06:55:22: DCS Flow

tberg at snf.stanford.edu tberg at snf.stanford.edu
Tue Jun 10 06:55:22 PDT 2008


Ran DCS and ammonia. Had DCS up to 100sccm it  was 
stable .perhaps flow was unstable because it had not been run for some time. Will leave yellow for observation




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