From rshyam at snf.stanford.edu Sun Aug 2 03:15:00 2009 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Sun, 2 Aug 2009 03:15:00 -0700 Subject: Problem thermconitride1 SNF 2009-08-02 03:14:59: Uniformity not good Message-ID: Ran LSN for 30 minutes. Visually looked very non-uniform. Also, one of my wafers came out broken. From maurice at snf.stanford.edu Wed Aug 5 16:25:56 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 5 Aug 2009 16:25:56 -0700 Subject: Shutdown thermconitride1 SNF 2009-08-05 16:25:55: failed leakcheck 2x Message-ID: Based at 26mtorr leakcheck failed in 5 sec There is some white deposit at door seal. I tried to wipe it off but tube is too hot. From tberg at snf.stanford.edu Thu Aug 6 09:01:02 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 6 Aug 2009 09:01:02 -0700 Subject: Shutdown thermconitride1 SNF 2009-08-05 16:25:55: failed leakcheck 2x Message-ID: Cleaned up front flange, pumped down fine leak rate good From maurice at snf.stanford.edu Mon Aug 17 11:47:57 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 17 Aug 2009 11:47:57 -0700 Subject: Problem thermconitride1 SNF 2009-08-02 03:14:59: Uniformity not good Message-ID: No dummy wafers in users run. -