Problem thermconitride1 SNF 2009-08-02 03:14:59: Uniformity not good

rshyam at snf.stanford.edu rshyam at snf.stanford.edu
Sun Aug 2 03:15:00 PDT 2009

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Ran LSN for 30 minutes. Visually looked very non-uniform. Also, one of my wafers came out broken.

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