From tberg at snf.stanford.edu Thu Jul 9 13:39:31 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 9 Jul 2009 13:39:31 -0700 Subject: Comment thermconitride1 SNF 2009-07-09 13:39:30: Update on ETA of pump Message-ID: Pump rebuilder says it should be back next week hopefully From tura at snf.stanford.edu Tue Jul 21 09:17:03 2009 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Tue, 21 Jul 2009 09:17:03 -0700 Subject: Comment thermconitride1 SNF 2009-07-21 09:17:02: Pump arrival time? Message-ID: status update would be appreciated. From tberg at snf.stanford.edu Thu Jul 23 13:20:00 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 23 Jul 2009 13:20:00 -0700 Subject: Comment thermconitride1 SNF 2009-07-23 13:20:00: PUmp is back- installing Message-ID: From tberg at snf.stanford.edu Thu Jul 23 13:20:42 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 23 Jul 2009 13:20:42 -0700 Subject: Comment thermconitride1 SNF 2009-07-09 13:39:30: Update on ETA of pump Message-ID: received -installing From tberg at snf.stanford.edu Thu Jul 23 13:20:52 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 23 Jul 2009 13:20:52 -0700 Subject: Comment thermconitride1 SNF 2009-07-21 09:17:02: Pump arrival time? Message-ID: received -installing From tberg at snf.stanford.edu Thu Jul 23 13:21:03 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 23 Jul 2009 13:21:03 -0700 Subject: Comment thermconitride1 SNF 2009-06-30 14:32:11: Estimate on pump delivery time? Message-ID: received -installing From tberg at snf.stanford.edu Fri Jul 24 09:25:32 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 24 Jul 2009 09:25:32 -0700 Subject: Shutdown thermconitride1 SNF 2009-06-22 07:40:25: Pump is dead Message-ID: Pump is replaced and back on line. should have a test before commiting good wafers From tberg at snf.stanford.edu Fri Jul 24 09:26:24 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 24 Jul 2009 09:26:24 -0700 Subject: Problem thermconitride1 SNF 2009-07-24 09:26:23: Needs a test afterr pump replacement Message-ID: Should have a test after pump replacement From jprovine at snf.stanford.edu Sun Jul 26 23:05:45 2009 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 26 Jul 2009 23:05:45 -0700 Subject: Comment thermconitride1 SNF 2009-07-26 23:05:45: possible test Message-ID: i ran N2 for 25 min targeting 100nm film thickness. no errors or pumping problems and all checks passed. i got 113 +- 4 over the wafer using nanospec as the measurement tool. no particles under microscope inspection. i don't know if this qualifies as a system test after repairs (snf website has not information about qual testing for thermconitride) but thought the info might be useful. From tberg at snf.stanford.edu Mon Jul 27 06:22:28 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 27 Jul 2009 06:22:28 -0700 Subject: Problem thermconitride1 SNF 2009-07-24 09:26:23: Needs a test afterr pump replacement Message-ID: Jay's result look good. ran N2 for 25 min targeting 100nm film thickness. no errors or pumping problems and all checks passed. i got 113 +- 4 over the wafer using nanospec as the measurement tool. no particles under microscope inspection. i don't know if this qualifies as a system test after repairs (snf website has not information about qual testing for thermconitride) but thought the info might be useful. From tberg at snf.stanford.edu Mon Jul 27 06:22:40 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 27 Jul 2009 06:22:40 -0700 Subject: Comment thermconitride1 SNF 2009-07-26 23:05:45: possible test Message-ID: Thanks Jay From tberg at snf.stanford.edu Mon Jul 27 06:23:04 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 27 Jul 2009 06:23:04 -0700 Subject: Comment thermconitride1 SNF 2009-07-23 13:20:00: PUmp is back- installing Message-ID: Jay's results: ran N2 for 25 min targeting 100nm film thickness. no errors or pumping problems and all checks passed. i got 113 +- 4 over the wafer using nanospec as the measurement tool. no particles under microscope inspection. i don't know if this qualifies as a system test after repairs (snf website has not information about qual testing for thermconitride) but thought the info might be useful. From cursive at snf.stanford.edu Thu Jul 30 15:47:35 2009 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Thu, 30 Jul 2009 15:47:35 -0700 Subject: Problem thermconitride1 SNF 2009-07-30 15:47:35: fail the leak check Message-ID: fail the leak check twice From cursive at snf.stanford.edu Thu Jul 30 20:44:34 2009 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Thu, 30 Jul 2009 20:44:34 -0700 Subject: Problem thermconitride1 SNF 2009-07-30 20:44:33: particle in tube and dummy wafer Message-ID: there are particles in tube and dummy wafer From tberg at snf.stanford.edu Fri Jul 31 07:48:40 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 31 Jul 2009 07:48:40 -0700 Subject: Problem thermconitride1 SNF 2009-07-30 15:47:35: fail the leak check Message-ID: Cleaned up particles and removed dirty dummies. Ran standy recipe, leak rate was good From tberg at snf.stanford.edu Fri Jul 31 07:48:51 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 31 Jul 2009 07:48:51 -0700 Subject: Problem thermconitride1 SNF 2009-07-30 20:44:33: particle in tube and dummy wafer Message-ID: Cleaned up particles and removed dirty dummies. Ran standy recipe, leak rate was good