From rshyam at snf.stanford.edu  Wed Nov 18 00:21:23 2009
From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu)
Date: Wed, 18 Nov 2009 00:21:23 -0800
Subject: Problem thermconitride1 SNF 2009-11-18 00:21:23: LSN recipe non-uniformity
Message-ID: <mailman.131.1356283551.4862.thermconitride1-pcs@snf.stanford.edu>

LSN recipe has been giving non-uniform layers for a long time. I've put a dummy wafer on the tube shelf. (LSN; 40 mins; 350-500 nm). You can see the variation on the dummy wafer. (Dummy wafer nitride is patterned and etched down to silicon. Nitride is visible in resist-covered areas. Resist has not been stripped.)