Problem thermconitride1 SNF 2009-11-18 00:21:23: LSN recipe non-uniformity

rshyam at snf.stanford.edu rshyam at snf.stanford.edu
Wed Nov 18 00:21:23 PST 2009


LSN recipe has been giving non-uniform layers for a long time. I've put a dummy wafer on the tube shelf. (LSN; 40 mins; 350-500 nm). You can see the variation on the dummy wafer. (Dummy wafer nitride is patterned and etched down to silicon. Nitride is visible in resist-covered areas. Resist has not been stripped.) 




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