From tberg at snf.stanford.edu  Tue Oct 20 06:03:18 2009
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Tue, 20 Oct 2009 06:03:18 -0700
Subject: Shutdown thermconitride1 SNF 2009-10-20 06:03:17: DCS cabinet Mod
Message-ID: <mailman.127.1356283551.4862.thermconitride1-pcs@snf.stanford.edu>




From tberg at snf.stanford.edu  Fri Oct 23 13:49:28 2009
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Fri, 23 Oct 2009 13:49:28 -0700
Subject: Shutdown thermconitride1 SNF 2009-10-20 06:03:17: DCS cabinet Mod
Message-ID: <mailman.128.1356283551.4862.thermconitride1-pcs@snf.stanford.edu>

DCS cabinet mod completed DCS back on to all tools flows checked



From tberg at snf.stanford.edu  Mon Oct 26 06:24:41 2009
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Mon, 26 Oct 2009 06:24:41 -0700
Subject: Shutdown thermconitride1 SNF 2009-10-26 06:24:41: DCS issues
Message-ID: <mailman.129.1356283551.4862.thermconitride1-pcs@snf.stanford.edu>




From tberg at snf.stanford.edu  Mon Oct 26 10:03:01 2009
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Mon, 26 Oct 2009 10:03:01 -0700
Subject: Shutdown thermconitride1 SNF 2009-10-26 06:24:41: DCS issues
Message-ID: <mailman.130.1356283551.4862.thermconitride1-pcs@snf.stanford.edu>

Replaced purge panel on epi side4