From rshyam at snf.stanford.edu  Mon Apr  5 01:00:44 2010
From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu)
Date: Mon, 5 Apr 2010 01:00:44 -0700
Subject: Problem thermconitride1 SNF 2010-04-05 01:00:43: N2 LO flow
Message-ID: <mailman.145.1356283551.4862.thermconitride1-pcs@snf.stanford.edu>

N2 LO set point is 2 sccm, flow is 0 sccm.
Noticed this during 'Backfill' step of N2 recipe. N2 HI is fine. (setpoint/flow 5 sccm.)



From tberg at snf.stanford.edu  Mon Apr  5 09:12:13 2010
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Mon, 5 Apr 2010 09:12:13 -0700
Subject: Problem thermconitride1 SNF 2010-04-05 01:00:43: N2 LO flow
Message-ID: <mailman.146.1356283551.4862.thermconitride1-pcs@snf.stanford.edu>

Replaced Lo N2 MFC also Bothe High and low N2 cannot  be on at the same time Process will correct recipe



From tberg at snf.stanford.edu  Mon Apr 12 11:01:07 2010
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Mon, 12 Apr 2010 11:01:07 -0700
Subject: Shutdown thermconitride1 SNF 2010-04-12 11:01:06: No DCS
Message-ID: <mailman.147.1356283551.4862.thermconitride1-pcs@snf.stanford.edu>

DCS should be here tomorrow



From seymour at snf.stanford.edu  Fri Apr 16 08:44:30 2010
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Fri, 16 Apr 2010 08:44:30 -0700
Subject: Shutdown thermconitride1 SNF 2010-04-12 11:01:06: No DCS
Message-ID: <mailman.148.1356283551.4862.thermconitride1-pcs@snf.stanford.edu>

dcs cylinder changed test needed



From seymour at snf.stanford.edu  Fri Apr 16 08:45:10 2010
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Fri, 16 Apr 2010 08:45:10 -0700
Subject: Problem thermconitride1 SNF 2010-04-16 08:45:09: needs test after cylinder change
Message-ID: <mailman.149.1356283551.4862.thermconitride1-pcs@snf.stanford.edu>




From wslee at snf.stanford.edu  Tue Apr 27 15:29:49 2010
From: wslee at snf.stanford.edu (wslee at snf.stanford.edu)
Date: Tue, 27 Apr 2010 15:29:49 -0700
Subject: Comment thermconitride1 SNF 2010-04-27 15:29:49: Good deposition, poor uniformity for LSN recipe
Message-ID: <mailman.150.1356283551.4862.thermconitride1-pcs@snf.stanford.edu>

I ran 01:00:00 on the LSN recipe and measured the following thicknesses:
Center:5436
Top:6024
Bottom:6506
Left:7069
Right: 6373
Earlier run obtained better uniformity using LSNTEST (00:40:00):
Center:2810
Top: 2877
Bottom: 2891
Left: 2952
Right: 2886
Numbers for LSN based on 1 wafer run on 4/20/2010
Numbers for LSNTEST based on 25 wafers run on 3/15/2010