Problem thermconitride1 SNF 2010-04-05 01:00:43: N2 LO flow

rshyam at snf.stanford.edu rshyam at snf.stanford.edu
Mon Apr 5 01:00:44 PDT 2010


N2 LO set point is 2 sccm, flow is 0 sccm.
Noticed this during 'Backfill' step of N2 recipe. N2 HI is fine. (setpoint/flow 5 sccm.)




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