Problem thermconitride1 SNF 2010-04-16 08:45:09: needs test after cylinder change
seymour at snf.stanford.edu
seymour at snf.stanford.edu
Fri Apr 16 08:45:10 PDT 2010
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Shutdown thermconitride1 SNF 2010-04-12 11:01:06: No DCS
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Comment thermconitride1 SNF 2010-04-27 15:29:49: Good deposition, poor uniformity for LSN recipe
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Shutdown thermconitride1 SNF 2010-04-12 11:01:06: No DCS
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Comment thermconitride1 SNF 2010-04-27 15:29:49: Good deposition, poor uniformity for LSN recipe
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