Comment thermconitride1 SNF 2010-04-27 15:29:49: Good deposition, poor uniformity for LSN recipe

wslee at snf.stanford.edu wslee at snf.stanford.edu
Tue Apr 27 15:29:49 PDT 2010


I ran 01:00:00 on the LSN recipe and measured the following thicknesses:
Center:5436
Top:6024
Bottom:6506
Left:7069
Right: 6373
Earlier run obtained better uniformity using LSNTEST (00:40:00):
Center:2810
Top: 2877
Bottom: 2891
Left: 2952
Right: 2886
Numbers for LSN based on 1 wafer run on 4/20/2010
Numbers for LSNTEST based on 25 wafers run on 3/15/2010




More information about the thermconitride1-pcs mailing list