From tberg at snf.stanford.edu  Wed May  5 06:10:55 2010
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Wed, 5 May 2010 06:10:55 -0700
Subject: Problem thermconitride1 SNF 2010-04-16 08:45:09: needs test after cylinder change
Message-ID: <mailman.151.1356283551.4862.thermconitride1-pcs@snf.stanford.edu>

several users have run since cylinder change



From tberg at snf.stanford.edu  Fri May 21 07:02:39 2010
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Fri, 21 May 2010 07:02:39 -0700
Subject: Comment thermconitride1 SNF 2010-04-27 15:29:49: Good deposition, poor uniformity for LSN recipe
Message-ID: <mailman.152.1356283551.4862.thermconitride1-pcs@snf.stanford.edu>

noted