Comment thermconitride1 SNF 2011-04-23 21:35:57: poor uniformity

cfchiang at snf.stanford.edu cfchiang at snf.stanford.edu
Sat Apr 23 21:35:57 PDT 2011


Ran NITVAR at 850C, 130mtorr for 3 hours, targeting 1.5um. Got 1.52um with STD close to 0.1um. 




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