From grahamab at snf.stanford.edu Mon Aug 1 16:40:48 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Mon, 1 Aug 2011 16:40:48 -0700 Subject: Problem thermconitride1 SNF 2011-08-01 16:40:48: vacuum wand barely has vacuum Message-ID: will barely hold a wafer. From tberg at snf.stanford.edu Tue Aug 2 06:22:44 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 2 Aug 2011 06:22:44 -0700 Subject: Problem thermconitride1 SNF 2011-08-01 16:40:48: vacuum wand barely has vacuum Message-ID: Untangled vacuum and tried wand it held wafer fine From grahamab at snf.stanford.edu Tue Aug 2 08:18:25 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Tue, 2 Aug 2011 08:18:25 -0700 Subject: Comment thermconitride1 SNF 2011-08-02 08:18:25: higher process pressure Message-ID: minimum process pressure was 198mTorr. During Maurice's run just prior to mine (same gas flows and temperature), the minimum process pressure was 192mTorr. From grahamab at snf.stanford.edu Tue Aug 2 09:52:44 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Tue, 2 Aug 2011 09:52:44 -0700 Subject: Problem thermconitride1 SNF 2011-08-02 09:52:44: high density of bubbles in film Message-ID: under microscope inspection, there is a high density of bubbles in the film. under low mag it looks like particles everywhere, but under higher magnification it looks like bubbles present in the film. From maurice at snf.stanford.edu Tue Aug 2 16:16:19 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 2 Aug 2011 16:16:19 -0700 Subject: Comment thermconitride1 SNF 2011-08-02 16:16:18: N2 test good Message-ID: Ran a N2 (standard stoichiometric) nitride 00:30:00 expected ~1000ANG actual 997 ANG RI=2.01 From wslee at snf.stanford.edu Wed Aug 3 12:53:32 2011 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Wed, 3 Aug 2011 12:53:32 -0700 Subject: Problem thermconitride1 SNF 2011-08-03 12:53:32: pumpdown issues Message-ID: When I came to the tube, it was vented (the tube status indicated that the standby recipe was run, but leak check failed so it vented). I ran boatcal that boated out the furnace very far until it got stuck. I stopped the boatcal and ran another recipe. When I finally did my actual recipe (N2 for 30min), it failed leak check on the first time and passed the second time. From grahamab at snf.stanford.edu Sat Aug 6 13:18:34 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Sat, 6 Aug 2011 13:18:34 -0700 Subject: Shutdown thermconitride1 SNF 2011-08-06 13:18:34: tube will not boat out Message-ID: after venting from standby recipe, tube did not boat out. it ran some boat stall sequence, but this didn't result in anything. boating out manually also did not work. From maurice at snf.stanford.edu Mon Aug 8 11:28:52 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 8 Aug 2011 11:28:52 -0700 Subject: Shutdown thermconitride1 SNF 2011-08-06 13:18:34: tube will not boat out Message-ID: Ted vented tube manually. The pumped it down and ran NITOUT. Vent ok and boated out From tberg at snf.stanford.edu Mon Aug 15 07:30:34 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 15 Aug 2011 07:30:34 -0700 Subject: Shutdown thermconitride1 SNF 2011-08-15 07:30:33: no dcs Message-ID: From tberg at snf.stanford.edu Mon Aug 15 09:52:06 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 15 Aug 2011 09:52:06 -0700 Subject: Shutdown thermconitride1 SNF 2011-08-15 07:30:33: no dcs Message-ID: DCS is back on and reset From maurice at snf.stanford.edu Fri Aug 19 11:38:16 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 19 Aug 2011 11:38:16 -0700 Subject: Comment thermconitride1 SNF 2011-08-19 11:38:16: increase N2 flow in NBKFILL Message-ID: Changed N2 HI flow from 5slm to 8 slm in the NBKFILL subroutine to get tube to atm before boat out step From maurice at snf.stanford.edu Fri Aug 19 14:56:32 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 19 Aug 2011 14:56:32 -0700 Subject: Problem thermconitride1 SNF 2011-08-03 12:53:32: pumpdown issues Message-ID: logged From maurice at snf.stanford.edu Fri Aug 19 14:58:50 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 19 Aug 2011 14:58:50 -0700 Subject: Comment thermconitride1 SNF 2011-08-19 14:58:49: LSN test Message-ID: Ran LSNTEST 00:30:00 expected~1050 actually 1085 ir 2.06 No bubbles in film. Dime size Nitride flakes on paddle. From maurice at snf.stanford.edu Fri Aug 19 15:04:06 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 19 Aug 2011 15:04:06 -0700 Subject: Problem thermconitride1 SNF 2011-06-03 17:48:13: higher than expected pressure Message-ID: Spoke with Andrew about the pressure. He chose a pressure that was pretty low (135mt...I think). With use, the pump and tube pressure will rise(until the pump is rebuilt) and it is now higher than the pressure he developed his process. All our standard recipes have pressures that are 200mt or higher. From maurice at snf.stanford.edu Fri Aug 19 15:04:53 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 19 Aug 2011 15:04:53 -0700 Subject: Problem thermconitride1 SNF 2011-06-14 15:48:08: high process pressure Message-ID: Spoke with Andrew about the pressure. He chose a pressure that was pretty low (135mt...I think). With use, the pump and tube pressure will rise(until the pump is rebuilt) and it is now higher than the pressure he developed his process. All our standard recipes have pressures that are 200mt or higher. From maurice at snf.stanford.edu Fri Aug 19 15:05:11 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 19 Aug 2011 15:05:11 -0700 Subject: Comment thermconitride1 SNF 2011-08-02 08:18:25: higher process pressure Message-ID: logged From tberg at snf.stanford.edu Mon Aug 22 06:41:53 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 22 Aug 2011 06:41:53 -0700 Subject: Problem thermconitride1 SNF 2011-08-02 09:52:44: high density of bubbles in film Message-ID: Maurice's test came out good.