Comment thermconitride1 SNF 2011-08-02 08:18:25: higher process pressure

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Tue Aug 2 08:18:25 PDT 2011


minimum process pressure was 198mTorr.  During Maurice's run just prior to mine (same gas flows and temperature), the minimum process pressure was 192mTorr.  




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