Problem thermconitride1 SNF 2011-08-03 12:53:32: pumpdown issues

wslee at snf.stanford.edu wslee at snf.stanford.edu
Wed Aug 3 12:53:32 PDT 2011


When I came to the tube, it was vented (the tube status indicated that the standby recipe was run, but leak check failed so it vented).
I ran boatcal that boated out the furnace very far until it got stuck.  I stopped the boatcal and ran another recipe.
When I finally did my actual recipe (N2 for 30min), it failed leak check on the first time and passed the second time.




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