From maurice at snf.stanford.edu Wed Feb 2 14:56:37 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 Feb 2011 14:56:37 -0800 Subject: Problem thermconitride1 SNF 2011-01-28 15:31:26: qual run thin Message-ID: Second test ran LSNTEST 00:15:00 expected 1100 ang actually 998 From pnataraj at snf.stanford.edu Sun Feb 13 20:16:35 2011 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Sun, 13 Feb 2011 20:16:35 -0800 Subject: Shutdown thermconitride1 SNF 2011-02-13 20:16:31: I can not get tube out, my wafers are still inside Message-ID: From tberg at snf.stanford.edu Mon Feb 14 08:08:08 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 14 Feb 2011 08:08:08 -0800 Subject: Shutdown thermconitride1 SNF 2011-02-13 20:16:31: I can not get tube out, my wafers are still inside Message-ID: Manually vented tube, user unloaded wafers, ran stbynit no problem From tberg at snf.stanford.edu Mon Feb 14 10:21:03 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 14 Feb 2011 10:21:03 -0800 Subject: Problem thermconitride1 SNF 2011-02-14 10:21:02: DCS is low Message-ID: If you have critical DCS runs perhaps you should delay. Cylinder is on order and should be here soon. From tberg at snf.stanford.edu Tue Feb 15 06:13:11 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 15 Feb 2011 06:13:11 -0800 Subject: Shutdown thermconitride1 SNF 2011-02-15 06:13:11: No DCS Message-ID: From tberg at snf.stanford.edu Wed Feb 16 07:56:10 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 16 Feb 2011 07:56:10 -0800 Subject: Shutdown thermconitride1 SNF 2011-02-15 06:13:11: No DCS Message-ID: DCS is back on From tberg at snf.stanford.edu Wed Feb 16 07:56:19 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 16 Feb 2011 07:56:19 -0800 Subject: Problem thermconitride1 SNF 2011-02-14 10:21:02: DCS is low Message-ID: DCS is back on