Shutdown thermconitride1 SNF 2011-02-13 20:16:31: I can not get tube out, my wafers are still inside

tberg at snf.stanford.edu tberg at snf.stanford.edu
Mon Feb 14 08:08:08 PST 2011

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Manually vented tube, user unloaded wafers, ran stbynit no problem

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Next message: Problem thermconitride1 SNF 2011-02-14 10:21:02: DCS is low
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