From grahamab at snf.stanford.edu Fri Jun 3 17:48:13 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Fri, 3 Jun 2011 17:48:13 -0700 Subject: Problem thermconitride1 SNF 2011-06-03 17:48:13: higher than expected pressure Message-ID: using recipe NITVAR. pressure setpoint was 130mT (has worked fine in the past), but only reaching 154mT during deposition. this will adversely affect the conformality. From tberg at snf.stanford.edu Mon Jun 6 13:55:15 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 6 Jun 2011 13:55:15 -0700 Subject: Comment thermconitride1 SNF 2011-06-06 13:55:15: Base and Leak Ok Message-ID: Base and leak rate good AI need to know flows before i can do anything else. From grahamab at snf.stanford.edu Tue Jun 14 15:48:09 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Tue, 14 Jun 2011 15:48:09 -0700 Subject: Problem thermconitride1 SNF 2011-06-14 15:48:08: high process pressure Message-ID: running recipe NITVAR, 850C, 60sccm NH3, 300sccm DCS; 130mT, but only reaching 165mT. From grahamab at snf.stanford.edu Thu Jun 23 12:39:21 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Thu, 23 Jun 2011 12:39:21 -0700 Subject: Shutdown thermconitride1 SNF 2011-06-23 12:39:20: DCS flow is steadily dropping Message-ID: I noticed the pressure was actually tracking the setpoint and then realized it's because the DCS flow has steadily dropped from 300sccm to under 200sccm (monitored to confirm it's decreasing). once tube has cooled I will remove my wafers. From tberg at snf.stanford.edu Thu Jun 23 13:09:35 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 23 Jun 2011 13:09:35 -0700 Subject: Shutdown thermconitride1 SNF 2011-06-23 12:39:20: DCS flow is steadily dropping Message-ID: DCS switched to other cylinder. Pressure is back up