Problem thermconitride1 SNF 2011-06-03 17:48:13: higher than expected pressure

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Fri Jun 3 17:48:13 PDT 2011


using recipe NITVAR.  pressure setpoint was 130mT (has worked fine in the past), but only reaching 154mT during deposition.  this will adversely affect the conformality.




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